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PhD Planar stage technology development

PhD Planar stage technology development

Faculteit Electrical Engineering
Graduate Program(s)
Electrical Engineering


This PhD position (starting August 2020) at the Control Systems group of the Electrical Engineering department of TU/e is part of a research consortium aiming at the development of high-precision planar stage technology as part of an IT2 project together with ASML, Prodrive and VDL ETG.

To enable 2nm node technology and 200 wafer per hours productivity for preserving the leading role of EU in Integrated Circuit (IC) manufacturing, a new generation of ultra-high precision electro-magnetic (EM) positioning systems is required that enable precise control of the magnetically levitated stage and its spatial deformations together with complete environmental decoupling (wireless stage). The aim is at establishing a novel moving-magnet planar motor technology that enables single stroke, point-of-interest (POI) positioning of wafers below 0.5nm accuracy with high-acceleration motion profiles.

The objective of this PhD research is making a significant step in advancing high-precision motion control of planar stage actuators to achieve the above specified accuracy and productivity objectives. The research involves significant laboratory work in terms of implementation and experimental verification of the research results on a prototype stage developed at TU/e in collaboration with industrial partners.

Main research directions:

  • Intelligent commutation methods: Advanced coil calibration methods (based on the physical understanding of position dependent and dynamical coil-magnet relations) will be performed together with compensation of disturbances beyond physical understanding via self-learning methods (deep recurrent neural networks, Gaussian process, reinforcement learning, etc.).
  • High-precision POI control via advanced motion control and spatial control: using state-of-the-art MIMO linear parameter-varying (LPV) feedback control for POI tracking together with improved feed-forward control for over-actuation and compensation of parasitic phenomena (e.g. eddy currents).


We are looking for a candidate who meets the following requirements:

  • You are a talented and enthusiastic young researcher.
  • You have experience with or a strong background in systems and control, mathematics, signal processing. Preferably you finished a master in Systems & Control, Mechanical Engineering or Electrical Engineering.
  • You have good programming skills and experience (Matlab, Python, C/C++, DSpace).
  • You have good communicative skills, and the attitude to partake successfully in the work of a research team.
  • You are creative and ambitious, hard-working and persistent.
  • You have good command of the English language (knowledge of Dutch is not required).


  • Challenging job in a dynamic and ambitious university and a stimulating internationally renowned research environment.
  • Full-time temporary appointment for 4 years.
  • Gross salary between € 2.325,00 and € 2.972,00.
  • An extensive package of fringe benefits (e.g. excellent technical infrastructure, the possibility of child care and excellent sports facilities).

Informatie en sollicitatie

For more information contact dr. Roland Toth (r.toth[a]
Or see 

More information on employment conditions can be found here:


If interested, please use the apply now-button at the top of this page. You should upload the following:

  • a brief letter motivating your interest and suitability for the position,
  • a detailed curriculum vitae including research experience,
  • transcripts of academic records indicating courses taken (including grades),
  • half-page summary of your MSc thesis,
  • contact details of two relevant references (email, phone number).

You can upload only 1 document (maximum file size is 10 MB). You have to bundle the documents.