Are you eager to work on fundamental plasma physical problems that find direct application in the high tech industry? In this project you will dive in the elementary processes that determine the interaction between small surfaces of micro-electro-mechanical systems (MEMS) and ionized media to solve contamination issues in ultraclean semiconductor manufacturing equipment for the future. In the project “MEMS materials in EUV-induced plasma (MIEP)” funded by Holland High Tech and the company ASML we have a PhD vacancy which is experimentally oriented. Are you the one to join our team?
Micro scanning mirrors are tiny devices used for dynamic light modulation for numerous applications, such as fast optical switches (telecommunications), LIDAR sensors (automotive), and in vivo diagnostics (healthcare). Application of arrays of such devices in Extreme Ultraviolet Lithography (EUV) tools would bring obvious benefits in performance, yield and accuracy, increasing productivity and lowering cost. However, all the optical elements in the EUV scanner are exposed to EUV and EUV-induced hydrogen plasma, which is a very aggressive environment. The materials used to fabricate micro-electro-mechanical systems (MEMS) must be able to remain functional in this complex environment of electrically and chemically active components and strong electric fields. They are also not allowed to contaminate the plasma, which would lead to deterioration of mirror surfaces and thereby to reduction of lifetime and availability. Thorough fundamental understanding of the interaction between EUV- induced plasma and MEMS materials is needed to assess the feasibility of using these promising devices in a realistic scanner environment.
From utilization point of view, immediate application of the research results in EUV Lithography and the development of novel mitigation strategies for nano contamination are important. As a PhD student in this project, you will perform in-depth (experimental) research which leads - through analytical modeling efforts - to enhanced understanding of the above ecosystems. At the same time, you act as bridge between the university and stakeholders from the involved company and other institutions. This means, that your research is fundamentally oriented while you always have in mind the application of your results in the relevant high tech environments.
The PhD position is fully embedded in the CIMlabs group in the department of Applied Physics of the Eindhoven University of Technology. However, candidates are expected to spend considerable time at the company as well in order to sense applicational oriented challenges and transfer knowledge. This gives you the chance to experience both: academia and industry. Besides research you will also contribute to education within the department. Apart from supervising BSc and MSc students in their research projects, other assistance in education, e. g. in bachelor courses, is usually limited to around 5% of your contract time. NOTE: For candidates with specific interest in teaching and education there is the option for a 5- year PhD studentship. Teaching and education will be substantial during this full PhD project, with a total amount of extra time equivalent to a full contract year. Please express your interest to the vacancy holder/supervisor in charge.
A meaningful job in a dynamic and ambitious university, in an interdisciplinary setting and within an international network. You will work on a beautiful, green campus within walking distance of the central train station. In addition, we offer you:
About us
Eindhoven University of Technology is an internationally top-ranking university in the Netherlands that combines scientific curiosity with a hands-on attitude. Our spirit of collaboration translates into an open culture and a top-five position in collaborating with advanced industries. Fundamental knowledge enables us to design solutions for the highly complex problems of today and tomorrow.
Information
Do you recognize yourself in this profile and would you like to know more?
Please contact the hiring manager dr.ir. Job Beckers, Principal Investigator CIMlabs, j.beckers[at]tue.nl.
Visit our website for more information about the application process or the conditions of employment. You can also contact HRServices.flux[at]tue.nl.
Are you inspired and would like to know more about working at TU/e? Please visit our career page.
Application
We invite you to submit a complete application by using the apply button. The application should include a:
We look forward to receiving your application and will screen it as soon as possible. The vacancy will remain open until the position is filled.
Please keep in mind you can upload only 5 documents up to 2 MB each. If necessary please combine files.